Veeco Launches New MOCVD System for LED Fabrication

Veeco Instruments Inc. has introduced the new TurboDisc® K475i™ Arsenic Phosphide (As/P) Metal Organic Chemical Vapor Deposition (MOCVD) System. LED makers can use the TurboDisc® K475i™ MOCVD system to fabricate red, orange, and yellow LEDs. The system can also produce multi-junction III-V solar cells, laser diodes, and transistors.

Veeco's new TurboDisc K475i As/P MOCVD System for LED production

Veeco introduces TurboDisc K475i As/P MOCVD System for LED Production

Strategies Unlimited predicts that the market for red, orange, and yellow LEDs will grow at a CAGR of 10 percent through 2023. Signage, automotive, display, and general lighting applications in addition to emerging applications including wearable smart devices are driving this demand, Strategies Unlimited says.

Veeco contends that its proprietary Uniform FlowFlange technology produces films with very high uniformity and improved within-wafer and wafer-to-wafer repeatability. Veeco claims, for these reasons, that the system has the industry’s lowest cost of ownership.

According to Veeco, the K475i system, which incorporates the company’s proprietary TurboDisc and Uniform FlowFlange™ MOCVD technologies, enables Veeco customers to reduce LED cost per wafer by up to 20 percent compared to alternative systems. This cost reduction per wafer is reportedly results from higher productivity, best-in-class yields, and reduced operating expenses.

Veeco says that the K475i MOCVD system’s patented technology offers easy tuning for fast process optimization and fast tool recovery time after maintenance enabling superior productivity for applications such as lighting, display, laser diode, solar, heterojunction bipolar transistors (HBTs), and pseudomorphic high electron mobility transistors (pHEMTs).

Shuangxiang Zhang, general manager of Yangzhou Changelight Co., Ltd. said, “The K475i quickly achieved unparalleled yield and brightness that will allow us to meet the growing demand for red, orange and yellow LEDs as well as other As/P based devices.”

James T. Jenson, Senior Vice President and general manager of Veeco MOCVD Operations stated, “We are very pleased with the world-class results reached at Changelight and their rapid qualification of the beta system. We have already seen strong industry interest in the K475i.”