Veeco Instruments Inc. reported the completion of a strategic effort with ALLOS Semiconductors (ALLOS) to demonstrate 200mm GaN-on-Si wafers for the production of Blue/Green micro-LEDs. ALLOS serves as a technology engineering and intellectual property licensing firm. Veeco partnered with ALLOS to impart their proprietary epitaxy technology onto the Propel® Single-Wafer MOCVD System. This epitaxy technology helped facilitate micro-LED production on existing silicon production lines.
“With the Propel reactor, we have an MOCVD technology that is capable of high yielding GaN Epitaxy that meets all the requirements for processing micro-LED devices in 200-millimeter silicon production lines,” said Burkhard Slischka, CEO of ALLOS Semiconductors.
“Within one month we established our technology on Propel and have achieved crack-free, meltback-free wafers with less than 30 micrometers bow, high crystal quality, superior thickness uniformity and wavelength uniformity of less than one nanometer. Together with Veeco, ALLOS is looking forward to making this technology more widely available to the micro-LED ecosystem,” Slischka said.
The Micro-LED display technology in the demonstration consisted of a 30×30 square micron red, green, blue (RGB) inorganic LEDs that were transferred to the display backplane to form sub-pixels. ALLOS contends that direct emission from these high-efficiency LEDs consumes less power than OLED or LCD displays and delivers superior brightness and contrast for wearables, mobile displays, and TV. The production of micro-LEDs demands high quality, uniform epitaxial wafers to satisfy the display yield and cost targets.
“In contrast to competing MOCVD platforms, Propel offers leading-edge uniformity and simultaneously achieves excellent film quality as a result of the wide process window afforded by Veeco’s TurboDisc® technology,” said Peo Hansson, Ph.D., senior vice president and general manager of Veeco MOCVD Operations. “Combining Veeco’s leading MOCVD expertise with ALLOS’ GaN-on-Silicon epi-wafer technology enables our customers to develop micro-LEDs cost effectively for new applications in new markets.”
ALLOS intends to offer licenses to its patents and technology and bring the technology to its customers’ MOCVD reactors.