Tokuyama Installs Aixtron Epitaxy Reactor for Development of AlGaN UV LEDs

Tokuyama Corporation of Japan, a company renowned for having the largest aluminum nitride plant, has purchased the Aixtron 200/4 RF-S epitaxy reactor for the development and production of aluminum gallium nitride (AlGaN)-based ultraviolet LEDs. Aixtron reported that Tokuyama Corporation successfully installed and started the machine at its research and development center in Tsukuba, Japan. Tokuyama reportedly one of the largest aluminum nitride plants in the world.

According to Aixtron, the AIX 200/4 RF-S reactor can provide the highest quality GaN and AlGaN layers due to its process stability and its ability to operate at up to 1400