Aixtron SE reported that Chinese optoelectronics producer San’an Optoelectronics has qualified Aixtron’s Close Coupled Showerhead (CCS) process chamber reactor for the production of Deep UV (DUV) LEDs . The new process chamber uses Aixtron’s CCS technology.
Aixtron asserts that the CCS reactor is the first commercially available MOCVD reactor that can operate with the ultra high process temperatures needed for the fabrication of DUV LEDs. Furthermore, Aixtron says that the improved chamber performance promotes more cost-efficient high-volume manufacturing of DUV LEDs that are used for aire and water purification. The 19 x 2-inch wafer configuration represents the largest available capacity in the market for producing DUV LEDs, Aixtron noted.
Dr. Ryan Chuo, Vice President of Technology Center, San’an Optoelectronics, commented, “The new Aixtron CCS reactor design is a key enabling factor for San’an producing next generation DUV LED products with higher quantum efficiencies and significantly higher output powers. Already being one of the largest suppliers for LEDs, Aixtron’s newly designed process chamber perfectly supports our strategic targets in the area of DUV LEDs….”