Max Planck Institute Purchases Veeco GEN10 Automated MBE Cluster System for Research into Oxide-Nitride Layer Structures

Plainview, New York USA-based Veeco Instruments Inc. reported that the Max Planck Institute of Microstructure Physics, Halle (Saale), Germany (MPI-MSP) ordered the dual chamber GEN10™ automated molecular beam epitaxy (MBE) cluster system. The Max Planck Institute cited reliability and the ability to customize the system as critical factors in its choice. Veeco says that the Max Planck Institute of Microstructure Physics (MPI-MSP), plans to use the system to support research into complex oxides.

Notably, demand for oxide-nitride layer structures has grown due to their tremendous potential for enabling next-generation energy-efficient nano-devices and advanced data storage. The department of Nano-systems from Ions, Spins and Electrons (NISE) at the MPI-MSP also intends to use Veeco’s MBE technology to develop innovative applications.

Max Planck Institute to Research Oxide Nitride Structures

“Our team is highly interested in exploring the properties of atomically engineered oxide-nitride layer structures especially because of their extraordinary properties but also for their potential in paving the way to novel energy-efficient nano-devices,” said Stuart Parkin, Director of the NISE Department at the MPI-MSP and Alexander von Humboldt Professor, Martin Luther University Halle-Wittenberg, Halle. “Veeco’s reputation and expertise in MBE combined with the GEN10’s high reliability, throughput, customization, and automation capabilities will help support our research into novel materials.”

Veeco points out that the win at MPI marks the first time Veeco provided a fully integrated solution for a concentrated ozone source. The GEN10 reportedly allows for up to three configurable, material-specific growth modules. According to Veeco, these modules enable high system utilization and allow multiple researchers to use the system at the same time to perform unattended growth.

“As our MBE systems continue to expand their footprint in the global R&D space, we are honored that Veeco’s GEN10 MBE system was selected by the highly respected Max Planck Institute of Microstructure Physics in Halle,” noted Gerry Blumenstock, vice president and general manager of MBE and ALD products at Veeco.