Matheson Tri-Gas Introduces Bulk Specialty Gas Delivery Systems for Ammonia

San Jose, CA, Matheson Tri-Gas, Inc., manufacturer of gas handling equipment, purification products, gas detection systems and provider of engineering services for the compound semiconductor and Silicon semiconductor industry, today announced that they have developed a best-in-class liquid withdrawal process for delivering UHP ammonia to serve the Compound Semiconductor Industry. The technology employs their advances in liquid phase withdrawal, vaporization and process control providing the highest available level of consistency in process purity and stability that can be delivered to the customer. The new delivery system is capable of flowing 1000 SLPM scalable to 5000 SLPM.

Dr. Robert Torres, research and development manager of Gas Technology at Matheson Tri-Gas explains, “Matheson’s process technology for liquid phase withdrawal has many advantages over conventional gas phase delivery systems. Conventional vapor phase withdrawal systems deliver unwanted volatile impurities with inconsistency causing significantly decreased reliability for point-of-supply or point-of-use purifiers. In addition, using product from the container heal below 25% of the liquid level loads high concentrations of moisture and metals impurities into the process. These impurities accumulate in the container as the liquid level decreases with use. Matheson’s liquid withdrawal delivery systems demonstrate the ability to use nearly 100% of the container with consistency in process purity through advances in equipment design and control. These advances in technology eliminate problems caused by delivering product from conventional vapor phase withdrawal systems.”

“We are very enthusiastic about our effort to serve this industry through our ‘Total Solutions Approach’ and ‘Compound Semiconductor Initiative’. Matheson’s liquid withdrawal delivery systems add more value than any other bulk delivery system available on the market today. Through our intense research effort, we have created an enabling technology that significantly reduces the customer’s cost of ownership. We are continuing to embrace the needs of this industry by creating new products that add value for our customers,” said Gary Orlando, Equipment Marketing Director for Matheson Tri-Gas.

Matheson Tri-Gas, Inc. is a single source provider of specialty gases, bulk gases, gas handling equipment, purification systems and support services to Silicon semiconductor and compound semiconductor manufacturers worldwide. The Semi-Gas Division’s core competencies include its ULTRA-LINE® high purity process gases, SDS® Safe Delivery Source®, Semi-Gas® Systems brand of gas handling equipment, NANOCHEM® brand of purification systems, customer technical services, systems engineering and site management services. Matheson Tri-Gas’s Semi-Gas Division is headquartered in San Jose, CA. Corporate headquarters is in Parsippany, New Jersey. The parent company, Nippon Sanso Corporation (NSC) is the world’s largest supplier of gases and equipment to the semiconductor industry. The San Jose Semi-Gas office is located at 625 Wool Creek Drive, San Jose, CA 95112. Telephone: 408 971-6500; Fax: 408 275-8643. Additional information can be found on Matheson Tri-Gas’s web site at or contact us at