k-Space Associates, Inc. has released the kSA Scanning Pyro, an in-situ tool for measuring temperature variations across Veeco K465i wafer carriers. Spot temperature measurements on wafer carriers can help MOCVD fabs tune the heater zones in an attempt to achieve uniform temperature profiles during fabrication.
The kSA Scanning Pyro makes use of the K465i’s slit viewport and employs a custom dual pyrometer to acquire a complete, high-resolution carrier temperature map from a single scan. k-Space says the tool can easily be adapted to other MOCVD tools, including the Veeco EPIK700 and the Aixtron G4 and G5.
“The kSA Scanning Pyro generates high-resolution, full carrier temperature maps to facilitate near real-time temperature adjustments and to identify hot/cold spots on carriers and wafers. MOCVD fabs with this tool can expect to have a competitive advantage in terms of yield, wafer uniformity and device performance,” commented Darryl Barlett, CEO of k-Space Associates, Inc.
The kSA scanning Pyro can combine simultaneous temperature measurements from two scanning sensor heads to map the entire carrier. The temperature measurements go from center thru the outer edge. Users can acquire either a full wafer carrier scan or a select sub-set of the full scan. Then, proprietary kSA software can perform analysis to identify problem areas. With this information, engineers can perform the necessary process and hardware adjustments to improve their product.