MOCVD Fabs can Now USE New k-Space Ex-situ Characterization Tool

k-Space Associates, Inc has introduced the kSA Emissometer. The Emissometer is an ex-situ tool that offers MOCVD fabs essential wafer carrier characterization, including emissivity, uniformity, and defect identification.

kSA Emissometer

 

After bakes and between runs, traditional MOCVD fabs perform subjective human test inspections of the quality of wafer carriers. The fabs usually rely on empirical data to adjust carrier temperatures from growth to growth. k-Space claims that the kSA Emissometer puts the science back in carrier evaluation.

The kSA Emissometer uses high-resolution carrier emissivity mapping and can detect defects and microcracks that aren’t visible to the human eye. The company designed the tool for operators and engineers to use to create full quantitative carrier maps in 10 minutes.

“The real advantage of the kSA Emissometer is that it provides fabs with systematic carrier data that can be integrated into their quality control processes. It also offers a go-no-go decision on carrier use and quantitative determination of the carrier emissivity, allowing for temperature set-point adjustments for individual carriers. In the end, this will lead to lower production costs and better device yields,” commented k-Space CEO Darryl Barlett.