eLaser Orders Aixtron AIX G5+ C System for GaN-based Power Electronics

German firm Aixtron SE reported that Elite Advanced Laser Corporation (eLASER), a Taiwan-based provider of electronics manufacturing services (EMS) for advanced optoelectronic and radio frequency (RF) components, has placed a repeat order for an AIX G5+ C system.

eLasers intends to use the AIX G5+ C system to fabricate gallium nitride (GaN) epitaxial wafers and devices for power electronics applications.According to Aixtron, the production tool will be installed during the second half of 2017 to complement the eLaser’s existing capacity.

eLaser orders Aixtron G5+ C system

eLaser orders Aixtron G5+ C system

eLaser’s New Aixtron System Enables Full Automation

The G5+C system integrates Aixtron’s Penta-Injector technology for what the company describes as the best material uniformities across the entire wafer diameter. The system also includes a Cassette-to-Cassette (C2C) Wafer Transfer Module for full automation of GaN processes.

“We have been impressed by the speed at which eLASER has transferred their device manufacturing processes on our system technology. Therefore, we are convinced that the recent addition of our AIX G5+ C platform which has become the tool of record at leading GaN power electronics manufacturers, will support the company’s goal to gain further market share in the GaN power electronics ecosystem. While offering configurations of 8×150 mm and 5×200 mm, the tool meets the toughest requirements from the silicon industry in terms of uniformity and particles. Thereby, AIXTRON’s G5+ C system technology is breaking down the barriers to bring GaN into silicon production lines,” says Aixtron SE President Dr. Bernd Schulte.