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SemiLEDs boosts LED epiwafer production with 4-inch AIXTRON Close Coupled Showerhead CRIUS MOCVD tool
Source/Type: Press Releases - As issued by company

December 15, 2009... Aachen/Germany--AIXTRON AG announced today that in the third quarter 2009 SemiLEDs placed an order for one Close Coupled Showerhead CRIUS MOCVD system in a 7x4 inch configuration. The system will be delivered in the fourth quarter 2009 and installed at the company's state of the art 4-inch LED chip line at its production facility in Taiwan.

Dr. Chuong Tran, President and COO of SemiLEDs, comments, "We have chosen the AIXTRON CRIUS system equipped with the Dynamic Reactor Height Adjustment feature, which facilitates growth at elevated pressures, providing an advantage for our proprietary MVP structure. Plus, we particularly appreciate their responsive back-up service ensuring we can meet our production obligations.”

Dr. Christian Geng, Vice President Greater China of AIXTRON, adds: “We are looking forward to this 4-inch project as it is the first Close Coupled Showerhead Reactor to complement the existing manufacturing line of Planetary Reactor systems at SemiLEDs.”

The terms CRIUS® and Close Coupled Showerhead® are registered trademarks.

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