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Meijo University Orders Aixtron System for Production of GaN-based UV And White LEDs
Source/Type: News - Staff reports

Author: LIGHTimes News Staff

July 28, 2010... Aixtron AG announced a new order for one Close Coupled ShowerheadŽ GaN based LED MOCVD system from Meijo University, in Nagoya, Japan. The university is an established Aixtron customer in Japan. The order was received earlier this year and the system will be delivered in the fourth quarter of 2010 in a 3x2-inch wafer configuration. Aixtron says that its local support team will commission the new reactor at Meijo University. The order includes both the EpiCurveTT and Aixtron Argus in-situ tool. The Argus in-situ tool is a new multi-channel pyrometer for real-time surface temperature measurement and analysis. Aixtron boasts that it is the only thermal profiling device available for a complete susceptor temperature mapping.

Associate Professor Dr. Motoaki Iwaya commented, "Meijo University plans to establish the LED Cooperative Research Center to develop white LEDs and UV-LEDs for lighting and bactericidal light sources with super energy-saving, high color rendering properties, long life-time and low-cost. This center has been selected as an advanced research institute, and funded by Ministry of Economy, Trade and Industry (METI). The center will be shared with partner companies for collaboration. One of the collaborating companies, EL-SEED Corp., a start-up venture company from Meijo University, will conduct the research project of next-generation white LED supported by the New Energy and Industrial Technology Development Organization (NEDO) at the center."

Dr. Iwaya added, "We have been very happy with our current system, an AIX 200/4 RF-S. Furthermore, Aixtron´s proven R&D showerhead systems have demonstrated in the past their great scalability and easy process transfer to showerhead production systems. The 3x2-inch system enables us to easily switch between 2-, 3- and 4-inch wafers, without any major adaption of the process conditions. Altogether, we are confident that the Aixtron MOCVD system is the best for the challenging task of GaN based LED development."

The Meijo University Department of Materials Science and Engineering is one of Japanese longest established faculties. Today the university's research targets include nanotechnology as well as semiconductor materials.

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