Epistar Qualifies Veeco K465i MOCVD System for LED Production Ramp
Source/Type: News - Staff reports

Author: CompoundSemi News Staff

May 21, 2010... Veeco of Plainview, New York USA, reports that Epistar Corporation of Taiwan will soon be ramping production of LEDs using its newly qualified TurboDisc K465i MOCVD system from Veeco. The K465i boasts superior wavelength uniformity, excellent run-to-run repeatability, and high capital efficiency in terms of the number of good wafers per day for each capital dollar. According to Veeco, the K465i can be easily tuned and optimized on wafer sizes up to 8 inches. After mainteance, Veeco says that the system enables a fast tool recovery time.

Dr. M.J. Jou, President of Epistar, commented, “Ramping to production quickly and maintaining high throughput is critical to our success. Veeco enabled us to qualify the K465i rapidly and it provides the automation required to produce highly uniform LEDs with minimal downtime. The K465i provides Epistar the ease-of-use and system availability to meet our growing production requirements.”

Bill Miller, Ph.D., Senior Vice President, General Manager of Veeco's MOCVD Operations said, “As a result of this successful qualification, we currently expect to ship a significant number of tools to Epistar this year. We are excited that we have been chosen to support their volume capacity ramp in 2010. This is an important milestone for Veeco as we continue to build our Taiwan installed base.”

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