HRL Laboratories to Boost GaN HEMT MMIC Capabilities with Aixtron MOCVD Tool
Source/Type: Reported News

Author: CompoundSemi News Staff

November 25, 2009... HRL Laboratories of Malibu, California USA, has reportedly ordered a Close Coupled Showerhead (CCS) 6x2 inch MOCVD system from Aixtron of Aachen, Germany. The order was received in the third quarter 2009 and the system will be delivered in the first quarter 2010. HRL says that the new system will be used to its work on advanced GaN technologies including growth of GaN HEMTs for millimeter-wave power applications and high voltage gallium nitride (GaN) transistors for high efficiency power switching applications.

A research staff member working on GaN at HRL commented, “We consider the high standard of performance and engineering of Aixtron’s CCS MOCVD tools a perfect match for our needs. Among the practical aspects which suit our applications are not only the low carrier gas consumption and overall efficient materials utilization but also the ease of maintenance. The CCS system has a proven track record thanks to the large number of systems installed worldwide and we will appreciate the good scale-up potential that enables an easy recipe transfer to a large system." Aixtron News Release

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