French Research Centre Purchases Oxford Instruments Plasmalab System
Source/Type: News - Staff reports

Author: CompoundSemi News Staff

November 18, 2009... Oxford Instruments Plasma Technology reports that it has won a contract to supply the French research centre, STnano in Strasbourg, with a Plasmalab System80 Plus ICP system. STnano is the new Strasbourg nanofabrication facility, established jointly by IPCMS (a CNRS lab) and University of Strasbourg (UdS). Researchers at the facility have expertise in the design of nanostructures through top-down methods, and the study of their magnetic properties.

Oxford Instruments’ Plasmalab System80Plus a plasma etching and deposition processing system. STnano has purchased the inductively coupled plasma (ICP) configuration of the system, to process multiple materials including Silicon etch. OIPT’s Plasmalab System80Plus is also available configured for etching and deposition (ICP-PECVD), reactive ion etching (RIE), plasma etching (PE) or plasma enhanced chemical vapour deposition (PECVD).

Dr. Hicham Majjad, Nanofabrication Manager at STnano, says that research centre chose an Oxford Instruments tool as it fitted their research requirements. “As a leading French research centre we demanded the highest specification system we could find to fit the specifications for the work we are undertaking. The Plasmalab80 Plus open load design allows for fast loading and unloading, ideal for prototyping and low volume production environments such as ours." He added, "The system has been bought as part of the STnano's programme to equip our cleanroom with state of the art instrumentation for nano and micro scale fabrication in the fields of molecular electronic, spintronic, and polymers.” Oxford Instruments News Release

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