Tegal Establishes Subsidiary, Tegal France
Source/Type: News - Staff reports

Author: CompoundSemi News Staff

May 18, 2009... Tegal Corporation of Petaluma, California USA, a developer of production solutions for power ICs and advanced MEMS, reports that it has established a wholly owned subsidiary in Annecy, France, called Tegal France. According to Tegal, the move completes its transition related to the Deep Reactive Ion Etching (DRIE) products and corresponding intellectual property for 3D packaging and MEMS devices which came from the acquisition of France-based Alcatel Micro Machining Systems (AMMS) and Alcatel Lucent.  The deal was first announced in September 2008 and completed later that month. Tegal says that the AMMS acquisition provides new opportunities in the MEMS and power device markets where Tegal is well entrenched.  Tegal notes that it also provides access to large and fast-growing new markets such as thru-silicon vias (TSVs) for 3D IC packaging. 

Tegal says that the new entity has staff composed of skilled engineers from the former AMMS operation. Tegal France will reportedly serve as the company's European hub and the nerve center of the its advanced DRIE product development initiatives.  General Manager/R&D Director, Nicolas Launay will lead the Tegal France operation.  Launay previously served as R&D Director at AMMS in Annecy.  He reports to Tegal’s Chief Executive Officer (CEO), Thomas Mika. Launay commented, "With our many combined years of etch technology development and process expertise within both the Tegal and the AMMS product families, we believe we can offer powerful new solutions to leading semiconductor manufacturers, especially those working on new-generation 3D packaging applications." Tegal Corporation News Release

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