SMI Licenses SiC MOCVD Enabling Technology from VEECO
Source/Type: News - Staff reports

Author: CompoundSemi News Staff

January 5, 2009... Structured Materials Industries (SMI) reports that it has licensed silicon carbide (SiC) MOCVD enabling technology from Veeco. SMI indicated that it would use the technology to enhance its SiC production tools that it hopes to offer soon. SMI reports that it is presently developing SiC production tools scaled at multiple 2-inch, 4-inch, and 6-inch production scales. The company contends its tools feature compatibility with advanced processes featuring high and efficient deposition rates. Dr. Gary S. Tompa was quoted as saying “SMI’s licensing of Veeco SiC MOCVD technology will greatly further and expand our efforts in helping to commercialize SiC MOCVD production tools. Over the past few years, SMI has made teamings for the development of SiC processes and dedicated device enabling materials production tools.” SiC is the only solution for highest power and/or high temperature devices in small packages. Applications include solar, automotive, military, and other industries. SMI says that its new SiC tool will help enable this important industry. SMI News Release

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