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IBM, Matheson TriGas, and Taiyo Nippon Sanso Partner on Semiconductor Manufacturing Technology
Author: CompoundSemi News Staff

April 28, 2008... IBM, Matheson Tri-Gas/ Taiyo Nippon Sanso are collaborating on the development of manufacturing materials and processes for CMOS at 32nm and under. Matheson Tri-Gas and its parent company, Taiyo Nippon Sanso hope to research and develop new high purity gas molecules and new delivery systems for the manufacturing of atomic-scale semiconductors. IBM will add its CMOS research capabilities to the collaboration. “Taiyo Nippon Sanso Group including Matheson Tri-Gas' cutting-edge source gases and advanced purification equipment, when integrated with IBM's state-of-the-art CMOS research capabilities, enables both companies to accelerate the pace of semiconductor innovation,” said Bernie Meyerson, Vice President Strategic Alliances and Chief Technical Officer for IBM Systems & Technology Group.

"This relationship with IBM will enable the Taiyo Nippon Sanso Group to position itself as a leading edge material supplier in the semiconductor material market beyond 32nm," said Mike Hara, Senior Managing Director of Taiyo Nippon Sanso Corporation. Matheson Tri-Gas News Release

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