Aixtron AG reports that Delft University of Technology, Netherlands has placed an order for one of Aixtron’s Black Magic CNT (carbon nanotube) deposition systems. The system is installed in a 1×4 inch wafer configuration in the Class 10,000 cleanroom of the Delft Institute of Microsystems and Nanoelectronics (DIMES) at the Delft University of Technology.
DIMES is a well equipped institute with Class 100-10,000 cleanrooms, MEMS laboratory and Special Applications Laboratory, covering 1500m2 in area.
Delft University of Technology reportedly decided on Aixtron’s Black Magic system after evaluating various tools in terms of low temperature deposition and system flexibility. Professor
Ryoichi Ishihara of the Faculty of Electrical Engineering, Mathematics and Computer Science (EEMCS) at DIMES commented, “The Black Magic system is a proven equipment for CNT growth. The system is flexible and robust, offering a wide range of processing capabilities to enable us to produce various types of CNT. These unique features attracted us for our research on CNT growth and MEMS devices.”