Delft University of Technology orders AIXTRON 4-inch Black Magic tool for interconnect and MEMS technologies

Aachen/Germany–AIXTRON AG today announced an order for one Black Magic CNT (carbon nanotube) deposition system from the Delft University of Technology, Netherlands. The system is installed in a 1×4 inch wafer configuration in the Class 10,000 cleanroom of the Delft Institute of Microsystems and Nanoelectronics (DIMES) at the Delft University of Technology.

Delft University of Technology evaluated various tools in terms of low temperature deposition and system flexibility, before deciding upon AIXTRON’s Black Magic system. Professor Ryoichi Ishihara of the Faculty of Electrical Engineering, Mathematics and Computer Science (EEMCS) at DIMES comments: “The Black Magic system is a proven equipment for CNT growth. The system is flexible and robust, offering a wide range of processing capabilities to enable us to produce various types of CNT. These unique features attracted us for our research on CNT growth and MEMS devices.”

DIMES has established a world-leading reputation for its innovative achievements in the field of