Asahi Kasei Purchases Aixtron CCS MOCVD System for DUV LED Fabrication

Aixtron SE reported that Japanese chemical company Asahi Kasei has ordered an Aixtron 
Close Coupled Showerhead system (CCS). Asahi Kasei plans to use the new system for pilot production of Aluminum Gallium Nitride (AlGaN)-based Deep Ultraviolet (DUV) LEDs. The system is scheduled to be delivered in the third quarter 2015.

Aixtron Close Coupled Showerhead MOCVD System

Aixtron Close Coupled Showerhead MOCVD System

Asahi Kasei based its choice of purchasing an Aixtron Showerhead reactor for fabrication of DUV LEDs on the company’s positive experience with a previously Aixtron CCS MOCVD tool already in operation. Aixtron notes that the CCS system enables optimization of the chamber geometry for both low and high-pressure operation with an added dynamic chamber height adjustment.
Dr. Bernd Schulte, executive vice president and COO of Aixtron SE, said, “Our MOCVD tool enables pilot production as well as R&D applications with processes that are directly scalable to larger systems. Enhanced by the reliable 3-zone heater the system also provides excellent temperature uniformity. This leaves Asahi Kasei with a very flexible, high-quality tool, perfectly matching the increasing demand for high-performance deposition systems for new application fields such as DUV LEDs.”

DUV LEDs are used in industrial and point-of-use (POU) water purification. DUV LEDs are also used to measure the purity of water, suffices, biological samples, and air in industrial and scientific instruments.

Since 2011, Crystal IS the U.S.-based manufacturer of UVC LEDs, has been part of the Asahi Kasei group.