Aixtron SE of Aachen, Germany announced that China’s Peking University is adding to its Aixtron equipment base with an order for a further Close Coupled Showerhead (CCS) reactor with capacity for three 2-inch (3×2”) substrates in a single run. The order was made in the second quarter of 2012 with delivery scheduled for the first quarter of 2013.
Professor Shen Bo, who will use the Aixtron reactor said, “We already have an Aixtron CCS system in use, and we are very satisfied with it. We now needed a system to improve our UV LED and laser research. The aluminium gallium nitride (AlGaN) material growth needed for this is very challenging due to the very high temperatures of more than 1200°C required. Also AlGaN is very difficult to dope, particularly with magnesium that is used to create the p-type regions needed for hole injection.”